Retrofitting for Resilience: A Flexible Approach to Treating Concentrated Metal Wastewater from Electrodeposition Tools

Date Published: 2025 | Conference materials

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As semiconductor fabs evolve, legacy wastewater treatment systems are increasingly challenged by higher metal loads, tighter discharge limits, and limited space for expansion. This presentation shares a real-world example of retrofitting an existing facility to manage concentrated copper waste streams from electrodeposition tools, focusing on adaptability, operational resilience, and lessons learned from deploying a compact, on-site treatment solution.

Companies:Membrion
Authors: Greg Newbloom
Tags: Zero Liquid Discharge (ZLD)Copper RemovalRetrofit

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