As EOP/ZLD becomes a necessary feature at every fab campus to decouple semiconductor manufacturing from constrained water resources, it will become critical for these EOP/ZLD facilities to include sufficient operational resilience to minimize the potential for a campus-wide impact. This paper defines potential failure mechanisms as well as offer several strategies– ranging from on-site business processes to close collaboration with the local POTW – to prevent or minimize the campus downtime resulting from an excursion at the wastewater treatment and reclaim plant.