Quantifying Yield Risks in Hot UPW Systems: Modeling, Material Variability, and On-Wafer Defectivity Analysis 

Date Published: 2026 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

Already have an account? Log in

Particle precursors extracted from high-surface-area components such as polymer piping can form particles on the wafer surface and threaten yield. This IRDS-supported study tests PFA and PVDF from multiple resin manufacturers and extruders, correlating in-liquid contamination with on-wafer defectivity and modeling a representative hot UPW system. It shows that yield risk depends on both extraction rate and contaminant stickiness, that materials from the same polymer family can differ significantly, and it lays the groundwork for an IRDS best-practices test method.

Authors: Gary van Schooneveld, Bob McIntosh, Marie Tripp, Ben Solberg
Tags: Particle Precursors

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo