Date Published: 2026 | Conference materials
To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.
Particle precursors extracted from high-surface-area components such as polymer piping can form particles on the wafer surface and threaten yield. This IRDS-supported study tests PFA and PVDF from multiple resin manufacturers and extruders, correlating in-liquid contamination with on-wafer defectivity and modeling a representative hot UPW system. It shows that yield risk depends on both extraction rate and contaminant stickiness, that materials from the same polymer family can differ significantly, and it lays the groundwork for an IRDS best-practices test method.