Identification of Organic Particle Precursors in Ultrapure Water

Date Published: 2024 | Conference materials

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Understanding the link between the polishing Mixed Bed and the presence of high molecular weight organics in ultrapure water. Mixed bed resins are known to shed ionic leachates, so the goal of this presentation is to ascertain whether leachates that may arrive at the point of use can be detected. By testing UPW samples it is seen how low molecular weight organic contamination can result in high molecular weight organic particles on wafer.

Companies:CT Associates , DOC-LABOR GmbH, UNISERS
Authors: Gary van Schooneveld, Larry Zazzera, Stefan Huber, Ario Cocina
Tags: Organic ContaminationParticle PrecursorsUltraPure WaterHigh Molecular Weight Organics (HMWO)

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