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Energy Consumption Conversion Method Considering the use of Ultra-Pure Plant Utilities

Date Published: 2024 | Conference materials

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This presentation analyses the energy consumption in an ultrapure water plant in South Korea using the Energy conversion method (SEMI S23-0813). It draws conclusions about the use of waste heat for the total input, the high energy consumption in the polishing process, and the electrical energy needed to operate the ultrapure water pumping system.

Companies:K-water
Authors: Kwon Boungsu, Se Wyan Tac, Lim Seung Ji
Tags: Energy ConservationSEMI StandardsUPW Polishing

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