Comparison of commercially available MBIX resins for UPW production using measuring techniques described in SEMI C93 and beyond

Date Published: 2025 | Conference materials

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A comparative analysis of the performance of five semiconductor grade mixed bed ion exchange resins, with a focus on the 'bleed' and shedding rates of metals, particles and organics from the resins.

Companies:Veolia Water Technologies & Solutions , CT Associates , DOC-LABOR GmbH

Authors: Wolfgang Gebicke, Gary van Schooneveld, Stefan Huber, Larry Zazzera

Tags: Ion Exchange ResinUPWParticle DetectionSEMI C93

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