A novel nanoparticle counter for UPW based on acoustic cavitation

Date Published 2023 | Conference materials

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Sub-20 nm nanoparticles in ultrapure water are known to be potential contaminants of semiconductors, thereby limiting the production yield. It is therefore essential to identify their sources and to measure their concentration and size in order to take appropriate measures for their removal. Traditional light-scattering technology has a low signal-to-noise ratio. This presentation presents a novel metrology based on acoustic counting to tackle these challenges.

Organizations: Ovivo
Authors: Pranit Iyengar, Najib Alia, Ian Briggs, Philippe Rychen, Pia Herrling,
Tags: UPWAcoustic Particle Counting (APC)NanoparticleMetrology and Analytical Technology

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