Application of a New SEMI F121 Guide for Evaluating Particle Precursor Metrology

Date Published: 2023 | Conference materials

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Particle precursors, defined as a dissolved molecular compound, which may form particles when dried on the wafer surface, have been identified in multiple studies as a risk to semiconductor manufacturing yield. The purpose of this paper is to demonstrate the utility of the Guide for Evaluation of Metrology for Particle Precursors in Ultrapure Water by evaluating multiple instruments at multiple facilities following the guidelines and comparing outcomes.

Authors: Michael Walker, Jikku Thomas, Derek Oberreit, Gary van Schooneveld, Bonnie Marion, Mark Litchy, Larry Zazzera
Tags: Particle PrecursorsUPWMetrologyIon Exchange

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