Kanomax FMT

Date joined: 2022


White Bear Lake, MN, USA

Company size

1-50 employees


Metrology and analytical service providers




Kanomax FMT provides a range of instrumentation for detecting particles as small as 10nm in ultrapure water. In 2015, the parent company Kanomax, headquartered in Japan, acquired Fluid Measurement Technology (FMT). FMT's flagship product was a non-volatile residue monitor. Kanomax FMT has also previously partnered with CT Associates for developing instrumentation for detecting sub-5nm particles in chemical-mechanical planarization (CMP) slurries.

UltraFacility Resources

Conference material | 2017
Measurement of High Molecular Weight Polymers by a Scanning Threshold Particle Counter​
Conference material | 2017
A New Method for the Rapid Identification of sub-20nm Particles in UPW​
Conference material | 2020
Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor
Conference material | 2022
Measurement of Particle Concentration and Wafer Defects during Ion Exchange Resin Rinse​

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