Ultrafacility 2025 Roundtable Summary: Design Considerations for High Purity Chemical Distribution Systems

At Ultrafacility 2025, Bryan Smith, Director of Technology and Product Management, Air Liquide Electronics US, hosted a roundtable titled “Design Considerations for High Purity Chemical Distribution Systems”. The discussion focused on high-level design considerations for chemical dispense systems for process chemicals used in semiconductor manufacturing, with structured discussion around source chemical handling, pumping, filtration, distribution, monitoring, and materials selection.

Smith provided Ultrafacility with a summary of how the roundtable discussion unfolded.

Pump Selection and Flow Control Strategies

Pump selection was a key debate, with discussion comparing centrifugal pumps and diaphragm pumps for improved filter stabilization and particle performance. Participants also discussed pressure and flow control approaches for recirculating loop distribution systems, particularly as system complexity and performance requirements increase, which means pressure and flow control strategies tend to shift from relatively simple, fixed operating setpoints toward more dynamic and tightly managed approaches.

Automation

The discussion demonstrated industry interest in greater automation within chemical source handling. Automated drum and tote handling equipment is an emerging way to reduce the potential for human error and safety incidents. Participants also explored the trade-offs between on-site chemical blending or chemical generation versus purchasing premixed chemicals, including considerations related to cost, supply chain risks, quality, and environmental impact.

Materials selection

Industry-wide changes in materials and distribution system design featured prominently as a topic for discussion. A trend toward the use of co-extruded PFA tubing (tube-within-a-tube) in place of traditional primary PFA tubing within rigid PVC secondary containment was discussed. Participants also raised awareness of increasing electrostatic discharge (ESD) events in high-conductivity solvents such as IPA, and even in ultrapure water, where ESD had not previously been a concern. The discussion concluded that this is likely tied to the increasing particle and ionic purity of these chemicals.

Filtration and metrology

Filtration and monitoring requirements were pervasive throughout the discussion. The drive toward tighter chemical particle specifications was discussed, including the likelihood that this will require multi-stage filtration at process tools, with potential implications for dispense pressure requirements. The need for more data on chemical quality from inline metrology was highlighted as an important consideration in system design and operation.

Finally, best practices for plastic dispense tank design were discussed, with attention given to mitigating risks related to mechanical and environmental stress cracking. 

This was one of many insightful technical roundtable discussions at the conference. For further perspectives, see this related session hosted by CT Associates; Ultrafacility 2025 Roundtable Summary: Identification of Organic Particle Precursors using ATR-IR, SERS and AFM-IR | Insights | UltraFacility