Air Liquide

Date joined: 2022


Paris, France

Company size

5000+ employees


Metrology and analytical service providers
Technology and equipment suppliers




Air Liquide is a world leader in gases, technology and services for industry and health, founded 1902. The company’s Electronics division delivers bulk ultra-high-purity gases required by the semiconductor industry, as well as detection sensors, equipment for gases and chemicals, and management services. Air Liquide’s brands include the ALOHA™ and Voltaix™ portfolios, which provide chemical and gaseous materials respectively for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) applications. The company’s recent innovation is the enScribe™ range of advanced etching materials which serve to reduce carbon equivalent emissions. Analytical services for cleanroom environments are provided by subsidiary Balazs NanoAnalysis.

UltraFacility Resources

Conference material | 2016
UPW ITRS and SEMI: Past – Present – Future of Enabling Advanced Existing and Future Technologies
Conference material | 2021
Nanoparticles characterisation for semiconductor UPW production system monitoring using ICP-MS
Conference material | 2018
Use of Extraction Modeling to Predict Contamination Levels in Ultrapure Water Systems
Conference material | 2020
AMC & High Purity Gases Control - Q&A

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