Yield and Reliability Opening Panel 2026

Date Published: 2026 | Conference materials

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This opening session looks at how increasingly sensitive semiconductor devices are tightening contamination-control requirements across ultrapure water, chemicals, gases, airborne molecular contamination and critical components. It also highlights emerging metrology and technology gaps, and how IRDS roadmaps and SEMI standards are evolving to protect yield and reliability at future nodes.

Authors: Slava Libman, Don Hadder, Jason Tewksbury, Andreas Neuber, Bob McIntosh, Gary van Schooneveld

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