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Trouble Shooting List during a trial run in a new UPW system

Date Published: 2023 | Conference materials

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K-water has installed a new UPW facility for Wafer (semiconductor raw material) manufacturing with100m3/hr capacity. During the trial there were more than 50 issues, but they were solved. This presentation shares and discusses these issues.

Companies:K-water
Authors: Myounghun Lee
Tags: UPWConstructionSupply Chain

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