Recalcitrant Compound Impacts on Waste Water Reclaim for Ultrapure Water Applications

Date Published: 2024 | Conference materials

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What are the roadblocks to UPW recycling? This presentation highlights important risks for considerations in returning water for UPW makeup to the fab, as well as associated energy costs. The presentation makes use of a Failure Modes Effects Analysis (FMEA) as well as a digital twin model to draw its conclusions.

Authors: Jason Tewksbury, Alex Evashenk
Tags: UPW recycling

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