Ozonated Water Reclaim on SCREEN Wet Tools

Date Published 2023 | Conference materials

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Ozonated water is generated by a sub-unit, where unused Ozonated water get purged out to waste to keep concentration stable in which accounted for 90% of DIW going thought the ozone generator unit. By developing a ozonated water reclaim unit, we are able to recycle the unused ozonated water and resupply it back to the generator unit. By doing so, the project may reduce the unused ozonated water waste to 0 and estimate to save more than 5 billion gallons of water by 2030 as it is proliferated throughout the Intel fleet.

Authors: Rey Tanaka, Yuta Nishimura, Russ Zornick, Tatsuhiro Suzuki, Jacob Dinh, James Snow,
Tags: Water ReclaimUPW recycling

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