Production of UPW notwithstanding urea strong variation from incoming feedwater
Date Published: 2024 | Conference materials
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Urea is a difficult to remove critical contaminant in UPW production that can have adverse effects on photolithography processes for semiconductor manufacturing. Using biofilters is an economical and environmentally friendly alternative to the physicochemical urea removal process which can be integrated into the pretreatment step to enable easier mitigation in case of urea breakthrough.
