Date Published: 2025 | Conference materials
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As fabs push toward tighter contamination limits and prepare for emerging PFAS regulations, piping materials used in hot UPW systems are coming under closer scrutiny. This presentation shares the development of a PFAS-free piping system aimed at reducing rinse-up time and improving startup efficiency while maintaining the purity and mechanical performance required for advanced nodes. Test results are used to illustrate how alternative materials can help facilities manage both yield risk and regulatory uncertainty without compromising UPW quality.