Water already purified for fab use can be recycled at the point of use (POU) and sent back to the same process for reuse or sent to a central plant for re-polish and reuse. As many end users are presented with the high costs of water resource purification and management, therefore, the notion of POU recovery and reuse of semiconductor-grade water is reasonable. This article describes the method of process water recycling and reuse and concludes that POU recovery of deionized (DI) water can match meet quality specifications for ultrapure water for fresh DI.