Influence of Particle and Particle Precursor Contamination from High-Purity Polymer Components on On-wafer Particle Defectivity

Date Published: 2025 | Conference materials

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This presentation addresses the impact of organic particles and particle precursors on on-wafer particle defects. Through a three-phase study, the IRDS UPW and Critical Components Task Force is developing a test method to assess the defectivity risk of particle precursor contamination from various materials and critical components.

Companies:CT Associates , GF Piping Systems

Authors: Gary van Schooneveld, Katrin Wallheinke, Larry Zazzera, Kamila Faryna, Anaïs Frezel

Tags: Wafer DefectivityParticle PrecursorsParticle MeasurementMetrology and Analytical Technology

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