High Purity Environments - Opening Panel 2023

Date Published: 2023 | Conference materials

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This panel answers three key questions:

  1. What are the key challenges for contamination control in liquids and gases?
  2. How can we ensure purity of liquids and gases from point of creation to point of use?
  3. How can we control contamination when metrology cannot keep up with the demands of new semiconductor technology? 
Authors: Ashutosh Bhabhe, Anthony Ozzello, Jason Maas, Anthony Ozzello
Tags: SemiconductorsSustainabilityChemical PurificationMetrologyFiltrationPurification

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