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Empirical Model to Understand the Particle Removal Behavior During Bulk Chemical Filtration

Date Published: 2018 | Conference materials

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This presentation was given at the Ultrapure Micro 2018 annual conference. It was presented in the Ultra High Performance Chemicals and High Purity Gases track, as part of the High Purity Chemicals in Semiconductor Manufacturing session.

Companies: Entegris
Authors: Ying Qi, Shannon Bradish, Kevin Seamster
Tags: ModelingCost ManagementParticlesFiltration

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