Advancements in PTR-TOF Technology for Improved Real-Time AMC Monitoring

Date Published: 2023 | Conference materials

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Airborne Molecular Contamination (AMC) is a major concern in clean production environments, including the semiconductor, pharmaceutical, and aerospace industries. In this study, the presenter highlights the benefits of real-time AMC monitoring solutions utilizing PTR-TOF technology and present recent advancements for this specific application.

Authors: Jens Herbig
Tags: Airborne Molecular Contamination (AMC)Semiconductors

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