A study on the defectivity of particle precursors using surface enhanced particle sizing

Date Published: 2023 | Conference materials

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Experimental work dissolving different HMWOs in UPW and showing impact on wafer surface using cutting-edge SEPS and SERS analytical technology.

Companies:UNISERS

Authors: Ali Altun, Gary van Schooneveld, Archita Sengupta

Tags: Particle PrecursorsWafer DefectivityParticle DetectionMetrology and Analytical Technology

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