A Retrospective Review of AMC Issues: Our Understanding and Issues Incurred

Date Published: 2020 | Conference materials

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This presentation was given at the Ultrapure Micro 2020 annual conference. It was presented in the AMC, Liquid Chemicals & Gases Control track, as part of the Airborne Molecular Contamination (AMC) and High Purity Gases Control session.

Companies:Texas A&M University , Samsung Austin Semiconductor

Tags: End-userOrganic ContaminationAirborne Molecular Contamination (AMC)

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