What is the Future of High Purity Chemicals for the Semiconductor Industry?

Dr. Ashutosh Bhabhe is the co-founder and CEO of 14Si Solutions, offering expertise in contamination control in process liquids and gases for semiconductor manufacturing. Previous to founding this company, Bhabhe worked as a Wet Etch and Cleans Applications Manager at Entegris Corporation in the Micro Contamination Control Division. He was responsible for development of leading-edge liquid filtration and purification solutions for semiconductor fabs in North America and across the world in wet etch and cleans applications and development of new analytical methods to aid development of filters. He has 11 years of experience in the semiconductor industry, with focus on Photolithography and Wet Etch and Cleans. He received his PhD and M.S in Chemical Engineering from the Ohio State University and a Bachelor’s degree in Chemical Engineering from the National Institute of Technology, Warangal, India. He has co-authored ten publications in peer reviewed scientific journals/conference proceedings.

Dr. Mistkawi was Principal Engineer/Technologist at Samsung. He joined Samsung Austin Semiconductor (SAS) CC (Wet Etch-Cleans/CMP/ Electro Plating (EP)) Engineering LSI in 2016. Since then, he has been leading innovations in chemical formulations and process technology development, steering yield improvements strategies, defect reduction, filtration technology research collaboration efforts with vendors, and cost savings projects. He has been a technical representative for SAS at the Semiconductor PFAS Consortium and a representative/chair for the Patent Review Committee & Paper Publication Committee at SAS. He has Mentored research at universities in collaboration with Samsung Advanced Institute of Technology. Previously, Dr. Mistkawi was at Intel where he joined in 1993 and was involved in the development of the first Pentium and all microprocessor generations that followed. Throughout his career he focused on path finding research efforts in the areas of wet, dry/gas/vapor phase etching, CMP, Electroplating, and Diffusion. His work spans from the fundamental materials research and development to the technology scaling, transfer, and sustaining for high volume manufacturing. Dr. Mistkawi was engaged in new factory startups, equipment selection, installation, and qualifications. He has Earned numerous Samsung and Intel awards in innovations and process technology development used in various manufacturing processes and microprocessor products. Dr. Mistkawi earned his bachelor’s degree in chemistry and biochemistry from the University of Oregon, 1993. He received his master’s degree in electrical engineering from Oregon Graduate Institute, 2004 and a doctoral degree in Physical Chemistry and Materials Science from Portland State University, Oregon, 2010. He holds 34 patents/disclosures, has authored several technical papers, and presented as keynote speaker in numerous conferences and events.

Dr. Archita Sengupta is a Principal Engineer, working at Intel for 20+ years. She is currently leading specific advanced metrology & defectivity control program from global supply chain and spearheading technical collaboration with multi-organizations for development and implementation of advanced chemical analytical metrology for defect detection and characterization. She has a PhD in Physical Chemistry/Chemical Physics. Spanning about 25 years in SEMI career, Archita is playing a critical role as advisor and pro-active mentor for many internal and external industry-consortia-university collaborative platforms. For the past decade, Archita has been the active voice and champion of the “Collaborative Global Supplier Eco-system End to End Defectivity Understanding and Control” campaign for Next Generation SEMI processes, & with this regard working with Industry partners, co-driving directives of future standards, spec and analytics technology development.