What Are New Trends In Semiconductor High-Purity And Wastewater Treatment?

Date Published 2015 | UPW journal archive

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Constant developments in the microelectronics industry, with finer line widths and the requirement of essentially particle-free water, also brings with it many challenges involving the conservation and reuse of water, treatment of growing streams of wastewater produced from high-purity water from processes such as CMP, photolithography and etchant rinsing. This article provides an overview of featured keynote speakers, technical presentations on UPW and process water/wastewater as well as Roundtable Networking session at the UPW Micro 2015 conference.

Organizations: Ultrapure Water
Tags: Metrology and Analytical TechnologyParticlesMarket TrendsConservationOzoneSilica

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