Unlocking Hidden Energy Efficiencies in Semiconductor Fabs Using an AI/ML-Based Approach

Date Published: 2026 | Conference materials

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Facility systems can account for up to half of a fab's total energy use, yet traditional energy-saving methods are reaching diminishing returns. This presentation outlines an end-to-end AI/ML framework for utility optimization, from data maturity assessment and cleansing through site-specific model development, deployment, and measurement and verification.

Authors: Jyo Chandrapati, Hong Zhao
Tags: Energy ConservationAIDigital transformation

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