Copper CMP wastewater is a strong candidate for reuse, but its complex matrix of copper, silica, and corrosion inhibitors such as benzotriazole (BTA) makes it difficult to treat to reuse quality. This presentation combines photocatalytic destruction of organics using TiO₂-loaded adsorptive beads with electrochemical copper removal and recovery. It shows how BTA and pH affect copper treatability, shares roughly five years of steady full-scale operation meeting copper discharge limits, and presents early results on reformulating CMP slurry with treated water.