JoinLogin

Thermogravimetric Study of VOC adsorptions of Zeolites used in Rotary Concentrator Thermal Oxidizer (RCTO) Units

Date Published: 2024 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

JoinLearn more
Already have an account? Log in

The semiconductor industry, including Intel, employs advanced abatement systems to mitigate environmental impacts by removing volatile organic compounds (VOCs) from manufacturing processes. A critical component of these systems is the Rotary Concentrator Thermal Oxidizer (RCTO) unit.

Companies:Intel
Authors: Ryan Pavlick, Biswajit Bandyopadhyay, Michael Nguyen, Steven Edmund
Tags: Exhaust GasIsopropyl Alcohol (IPA)Volatile Organic Compounds (VOC)

Related resources

Solutions to the IPA Abatement Challenge
Conference material | 2021

Solutions to the IPA Abatement Challenge

Sign in or Join to access.
Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor
Conference material | 2020

Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor

Sign in or Join to access.
Conference material | 2024

Reduction of Organic Wastewater via IPA and Water Separation Using a Zeolite Membrane, by Experiment and Simulation

Sign in or Join to access.
Technical journal archive | 2016

Achieving IPA removal in UPW from marangoni dryers in semiconductor production

Sign in or Join to access.
Back to Technical Knowledge Base

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.
JoinLearn more

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo