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Simulation of Metal Contamination in Wet Cleaning of Doped Silicon Wafer​

Date Published: 2017 | Conference materials

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This presentation was given at the Ultrapure Micro 2017 annual conference. It was presented in the Ultrapure Water Production track, as part of the Enabling Advanced Fab Needs session.

Companies:Sumco USA
Tags: Metal ContaminationWafer Defectivity

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