IRDS & SEMI Update 2026

Date Published: 2026 | Conference materials

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This presentation provides an update from the IRDS Environmental Sustainability for Semiconductor Facilities (ESSF) team on its 2026 roadmap, covering direct emissions, energy, water circularity, chemicals and waste, and tool integration. It highlights key capability gaps in information management, technology, and standardization, and introduces the SEMI F98 KPI as a way to compare trade-offs between water, energy, chemicals, and waste before calling a change an improvement.

Companies:FTD Solutions , IRDS

Authors: Marina Cameron

Tags: IRDS & SEMIEnergy ConservationEmissionsWater Reclamation and ReuseChemicals

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