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Identification and Management of Potential Particle Precursors from Mixed Bed Ion Exchange

Date Published: 2023 | Conference materials

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Organic contamination present in Ultrapure Water (UPW) poses a risk of depositing on the wafer surface during processing and cleaning. This new account of organics in UPW is important because it will enable better monitoring and improved control of potential particle formation on wafers. SEMI UPW TF particle precursor challenge evaluated sub-15nm filters and show the particle formation pathways.

Companies: CT Associates , DOC-LABOR GmbH, FTD Solutions
Authors: Stefan Huber, Gary van Schooneveld, Bonnie Marion, Larry Zazzera
Tags: Mixed Bed Ion ExchangeParticle PrecursorsUPW

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