Filter Retention methods reality check 

Date Published: 2026 | Conference materials

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Critical particle sizes in semiconductor manufacturing are now below 5 nm, but the three SEMI standards for rating sub-50 nm UPW filters (C79, C82, and C89) can produce conflicting results. This presentation shares findings from a SEMI UPW Task Force white paper comparing these methods and offering guidance on method selection. It examines the gap between laboratory filter ratings and real-world performance, and concludes that C79 offers the clearest link to field contamination and start-up behavior in UPW systems.

Companies:Pall , Intel
Authors: Jochen Ruth, Gerd Heser, Jason Tewksbury
Tags: Filtration TechnologiesMetrologyUPW

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