Enabling Sustainable Semi Facilities via International Roadmap for Devices and Systems ESSF and Semi Standards

Date Published: 2025 | Conference materials

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This presentation provides an overview of the IRDS Environmental Sustainability of Semiconductor Facilities (ESSF) roadmap and how it is being used to align sustainability priorities across the semiconductor value chain. It explains how industry stakeholders collaborate through the roadmap to identify risks, close technology gaps, and translate sustainability needs into standards, metrics, and practical guidance, with updates on recent progress, key challenges, and focus areas such as energy, water, air emissions, and PFAS management.

Companies:IRDS, SEMI
Authors: Slava Libman, Paul Kerr, Andreas Neuber, Jeff Rudnik, Chris Jones, Diego Kiper, Rony David Mathew, Amanda Tharp
Tags: IRDS & SEMIEnvironmental SustainabilityWater ConservationEnergy Conservation

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