Electrochemical Recovery of TMAH from Semiconductor Wastewater 

Date Published: 2026 | Conference materials

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TMAH is widely used as a photoresist developer, and TMAH-containing wastewater is conventionally destroyed through biological treatment that requires large footprints and recovers nothing. This presentation describes a multi-step alternative in which segregated TMAH wastewater is pretreated by nanofiltration and ion exchange, then electrolyzed to regenerate TMAH for reuse. It shares case studies including a full-scale electrolysis plant operating for more than a decade with a 20% lower carbon footprint, and highlights other salt-splitting applications for turning waste streams into valuable chemicals.

Companies:De Nora Water Technologies
Authors: Geer Quile, Thomas Will
Tags: Tetramethylammonium Hydroxide (TMAH)Resource Recovery

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