Case studies on semiconductor ultrapure water and wastewater reclamation using the latest generation of RO Membranes

Date Published 2023 | Conference materials

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In the semiconductor manufacturing process, a large amount of ultrapure water (UPW) is used in the cleaning operations performed before and after each process. In order to alleviate the shortage of limited water resources, the recovery and reuse of wastewater has been attracting attention.

Organizations: Hydranautics , Nitto Denko Corporation
Authors: Ishihara Satoru, Tomi Yasuhiro, David Shin,
Tags: SemiconductorsWastewater ReclaimRO technologiesReverse osmosis

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