JoinLogin

Advanced Technology Design for hot UPW supply

Date Published: 2022 | Conference materials

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

JoinLearn more
Already have an account? Log in

A study of operational decisions to increase capacity to allow greater consumption of hot ultrapure water. This presentation shows a new design in a fab which is successively transferred to the other existing hot ultra pure water plants, in order to be able to react to future changes in consumption.

Companies:GlobalFoundries
Tags: UPW SystemUltraviolet (UV)Fab Operation

Related resources

Conference material | 2018

Semiconductors: Driving Innovation and Changing the World

Sign in or Join to access.
Risk centered asset management
Conference material | 2021

Risk centered asset management

Sign in or Join to access.
Conference material | 2015

THM – A Novel Sustainable Approach as a Global Solution for UPW Applications

Sign in or Join to access.
Training series | 2018

End-of-Pipe Semiconductor Wastewater Reclaim

Sign in or Join to access.
Back to Technical Knowledge Base

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.
JoinLearn more

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo