SEMI launches new Smart Sustainability Model for fab resource reduction

SEMI has released a Smart Sustainability Model (SSM) as a tool for device makers and packaging fabs to progress towards Net Zero carbon emissions, water, and hazardous waste target metrics. The model is the product of the Accelerating Sustainability with Smart Manufacturing task force comprised of a diverse group of supply chain professionals and led by Dr. Brian J. Coppa of ULVAC, Inc. SEMI touts this new product as the first customizable comprehensive roadmap that exclusively leverages Industry 4.0/5.0 best practices for sustainability optimization in semiconductor manufacturing.

How it works and primary audience

The SSM is a progressive model that directs fab users in how to climb the ladder of smart technology implementation from connecting, to sensing, to predicting phases for achieving cumulative improvements in target metrics. See our previous article on this topic for additional background.

The intended audience for this SEMI product is not limited exclusively to one subset of device makers, as it guides fab users of all wafer sizes and device types in identifying opportunities and gaps at the cleanroom tool, subfab and facilities levels following a systematic quantitative approach to baseline metric improvements. Considering proportional consumption metrics for each unit of the fab on a normalized basis enables model users to prioritize capital investment based on the expected impact of each technology use case individually.

The SEMI task force envisions brownfield fabs within companies that adopt the SSM as the test beds for verifying the efficacy of innovative technologies before incorporating these beneficial technologies into future greenfield fabs. As implementation of the SSM concept grows within a company, it can be used to develop a Smart Sustainable Golden Fab for global roll-out to other sites, or as an internal benchmarking tool for comparing different factory types for auditing use case impact over time.

Ecosystem synergy

Beyond device makers, the SEMI task force has received strong interest throughout the semiconductor and packaging fab ecosystem from previous SSM-related white papers laying out the model foundation, logic, scope and impact in detail. Device-making fabs are highly reliant on their supply chain (e.g. equipment makers, material suppliers and IT infrastructure companies) to invest in and develop mature commercial solutions when it comes to sustainability. Thus, the SSM is meant to drive the ecosystem towards a common roadmap for accelerating alignment, consolidation, and economies-of-scale around recommended best practices. The SSM concept is expected to be influential in driving related high-tech manufacturing sectors in this same direction.

Benefit 1: Site selection

The SSM could widen the geographic scope of locations for new greenfield fab construction where environmental resource limitations and local regulation may have otherwise removed the site from contention. The model can assist companies in determining potential reduction projections in Scope 1 process-based carbon emissions, energy, water, and hazardous emissions and waste to meet sustainability targets relative to anticipated baseline performance.

Benefit 2: Return on investment (ROI)

SEMI expects device maker ROI from adopting the SSM in three areas tied to revenue:

Cost. Lower long-term spending on utilities, environmental regulatory compliance and permitting, process materials, and hazardous waste disposal and transportation.

Speed. The semiconductor industry could reap the benefits of sustainability designed in from the start, with help from machine learning and AI to accelerate process development, shorten time-to-market, and reduce cycle time.

Output. Amid growing global chip demand (particularly for HPC and AI applications), adding Industry 4.0/5.0 elements across all fab levels could increase yield, boost reliability, and decrease the opportunity cost of not meeting customer demand and losing deals.

At SEMICON West

The task force has organized a session called Smart Manufacturing for Sustainability: Net Zero Carbon, Water and Waste at SEMICON West in San Francisco, CA. On Thursday, October 15th, 2-4pm in the Smart Manufacturing Pavilion, this session will highlight innovative strategies and technologies driving sustainability in semiconductor manufacturing. Speakers will present use cases connected with the SEMI SSM regarding smart technology across the process tool, subfab and facilities levels that enhance environmental resource efficiency, yield and cycle time, applied to:

• Greenfield fab design
• Process gas and chemical recycling
• Energy efficiency
• Waste heat recovery
• Water management

The Smart Manufacturing Pavilion will also host a poster session and networking event on Wednesday, October 14 (from 4:30-6pm), which will cover related topics.