Organo

Project engineer for UPW optimization and conceptual design projects addressing capacity and performance for semiconductor clients. Former UPW system owner at a large semiconductor fabricator.

FTD Solutions

Dr. Rushikesh (Rushi) Matkar is the Pathfinding Technologist for Water purification at Intel’s R&D Center in Hillsboro, OR and a corporate owner for the leadership roadmap of Intel's water management group. Responsible for driving solutions towards the success of Intel's high volume manufacturing roadmap. He is passionate about high purity delivery of utilities, IOT and advanced manufacturing. Between Academia and Industry, Rushi has extensive experience in bringing new IP to Market. Recently, Rushi successfully led the program to introduce EUV Lithography as a patterning solution for fabrication at Globalfoundries. He has served multiple roles within the leading nodes in technology management, operations and engineering management to help multiple technology nodes meet mass-market benefits.

Ovivo

Hideaki IINO is a Chief Researcher at KURITA WATER INDUSTRIES LTD, where he currently manages JDP activities with Interuniversity of MicroElectronics Centre (IMEC) in Belgium. I have been more than 10 years in the semiconductor industry on both the UPW technology and wet process business. I began my semiconductor career from developing particle reduction in UPW with a major component supplier, then subsequently learned the water purification and wet clean processes with IMEC. I have a lot of patents and conference presentations. I am a member of the IRDS UPW group.

Kurita Water Industries

With a B.S. in Electrical Engineering and graduate coursework in Optical and Aeronautical Engineering from the University of Colorado, Steve brings over three decades of experience developing and applying advanced particle monitoring and contamination control technologies across semiconductor, aerospace, and defense sectors.


 (Random Hill Publishers, 2005), authoring Chapter 42: 

Particle Monitoring in Semiconductor Manufacturing

 (2nd ed. 2002; 3rd ed. 2015) and has written more than 100 technical papers and application notes.


His technical expertise has supported cleanroom monitoring programs for the Space Shuttle, James Webb Space Telescope, U.S. Air Force, and SpaceX Dragon Crew Module. He has also lectured at leading institutions including SUNY Albany, National Taiwan University, UCLA, University of Texas, and the University of Colorado, covering topics in particle physics and mechanics.


Today, as Global Product Manager at TSI, he continues driving innovation, shaping product strategy, and helping TSI lead the field in precision environmental monitoring and contamination control.

TSI Incorporated

Brad Herbert is a Sr. Process Engineer with Jacobs. Brad’s areas of focus include water management, water reclaim, ultrapure water, wastewater, chemicals, mentoring, and staff development. Over the past 30 years, Brad has worked as a global facilities engineer, site facilities engineer, facilities manager, design consultant, project manager, and product engineer in the semiconductor and water treatment industries. He has led engineering efforts, managed projects, and supported operations throughout The Americas, Europe, and Asia. His work history includes onsemi, LSI Logic, AMD, IDC (CH2M), DeNora Water Technologies, Monsanto, and Sigma-Aldrich. Brad is a licensed Professional Engineer and has a B.S. Degree in Chemical Engineering from the University of Missouri.

Jacobs

Microelectronics UPW Technical Director for Evoqua Water Technologies, LLC. Responsible for process development, optimization, troubleshooting and technical support of high purity water systems within the semiconductor, nanotechnology and solar markets. Also responsible for operating and maintaining an E-1.2 UPW system in the Evoqua Microelectronics Technology Suite. Has been with Evoqua (starting with IWT) for over 37 years in various roles responsible for developing, growing and supporting products and technologies within the Corporate and Industrial segments. These roles include; Product Manager, Process Development Manager and Applications Engineering Manager. Bachelor of Science in Chemical Engineering, with emphasis on high-energy physics, from the University of Wisconsin, Madison, and located at the Evoqua office in Rockford, Illinois. Authored and co-authored several papers on topics including nanofiltration, reverse osmosis, ultrafiltration, advanced oxidation and particle removal for the semiconductor industry.

Xylem

Dr. Altun is the co-founder and CEO of UNISERS AG, an ETH Zurich spinoff from Switzerland. UNISERS has been developing a wafer defect inspection and review tool with a sub-10nm detection limit. Dr. Altun has 15-year experience in nanotechnology and optical sensing. Prior to his position at UNISERS AG, he did a Ph.D. at ETH Zurich. He worked at Lawrence Livermore National Laboratories (2011-2014) and Korean Institute of Machinery and Materials (2005-2010). He had his B.Sc. degree from METU (Middle East Tech. Univ.), Turkey and M.Sc. degree at KAIST (Korea Advanced Institute of Science and Technology).

UNISERS

Beau Farmer is the Chief Technical Officer at TSI Incorporated, a global leader in precision research, analytical, and measurement instrumentation headquartered in Shoreview, Minnesota. He leads TSI’s efforts to identify and develop emerging technologies through collaborations with universities, small businesses, and industry partners, as well as through strategic acquisitions. Under his leadership, these collaborations have produced new products and government-funded projects such as nanoparticle monitoring instrumentation, miniaturized water-based condensation particle counters, and nanoparticle–protein binding research. Beau earned his Ph.D. in Applied Physics from Cornell University in 1990 where his research focused on 

Defect Dynamics and Wear-Out in Ultra-Thin Dielectrics on Silicon

. Before joining TSI in 2003, he was a tenured physics professor at the New Jersey Institute of Technology (NJIT), with joint appointments at Rutgers and Columbia Universities. He served as principal investigator on over $5 million in research funding, including NSF CAREER, EPA, and state-sponsored MEMS initiative awards. He is a Senior Member of the IEEE, has authored more than 60 peer-reviewed publications and holds 16 U.S. patents.

Alain is a Global Technical Lead and Senior Application Specialist TSI Incorporated, based in Aachen, Germany. With over 30 years in contamination control, cleanroom monitoring, and precision instrumentation, he supports global teams and customers in implementing advanced environmental monitoring strategies across pharmaceutical, semiconductor, and life science industries, including expertise in Facility Monitoring Systems (FMS) Software for real-time data management and compliance.


Before TSI, Alain held senior engineering and project management roles, leading complex cleanroom installations, particle monitoring systems, and facility validation projects. Known for blending technical expertise with practical application, he helps organizations achieve the highest standards of contamination control and regulatory compliance worldwide.


Alain is an active member of ISPE, PDA, IEEE, IRDS, and the UltraFacility community, contributing to industry best practices and innovation in contamination control.

Dr. Sriram (Ram) Ramamoorthy is a Supply Chain R&D Engineer/Technologist in Intel’s Fab Materials Organization managing specialty chemicals and filtration. Prior to this role, Ram was a senior process technology development engineer in Intel R&D fab in Oregon developing front end wet etch processes. Ram is an active member in IRDS and SEMI task forces and standards team. Ram received his Ph.D in Chemical Engineering from Rensselaer Polytechnic Institute (Troy, NY).

Intel

Senior Process Chemical Engineer with 30+ years of experience working in Facilities Operation Engineering and Design within the semiconductor manufacturing industry. He is a Subject Matter Expert in chemicals, chemical systems, and application for semiconductor manufacturing, pollution abatement, water and wastewater treatment and supporting HazWaste systems and operation.

Micron

After more than 20 years as water treatment engineer at Rousset plant (France), in charge of subcontractor team (2 engineers, 2 technicians), operating UPW plant and waste water plant, I'm water program manager, technical leader for Ultra Pure Water Water treatment for STMicroelectronics Front-End plants (France, Italy, Singapore) - Technical support (project and troubleshooting) - Quality and monitoring standardization - Water saving focus - Invest technical approval - UPW engineers team coordination Ultra pure water specialist.

Joe Yabuki

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