JoinLogin

Energy and water use efficiency considerations in ultrapure and wastewater system design and operation for semiconductor fabs

Date Published: 2023 |

Log in or Join UltraFacility to access this content

To access our resources you will need to be a member of UltraFacility, log in to your account or purchase a membership to view this content.

JoinLearn more
Already have an account? Log in

The paper will present KPIs and calculation methods to quantify environmental impact with regard to water treatment systems. Some of them are targeted on assessing the overall water management concept, others will be used to assess individual parts.

Companies:Enviro-Energy Solutions , Applied Materials
Authors: Andreas Neuber, Bob McIntosh
Tags: WastewaterEnergy ConservationUPW System

Related resources

Conference material | 2018

Semiconductors: Driving Innovation and Changing the World

Sign in or Join to access.
PFAS Treatment Management and Design Best Practices
Conference material | 2022

PFAS Treatment Management and Design Best Practices

Sign in or Join to access.
Conference material | 2015

THM – A Novel Sustainable Approach as a Global Solution for UPW Applications

Sign in or Join to access.
Training series | 2018

UPW System Configurations

Sign in or Join to access.
Back to Applied Materials

Not an UltraFacility Member?

Be part of year-round collaboration and knowledge exchange. Get access to the full range of tools leveraged by facility representatives and leading global experts from across the supply chain.
JoinLearn more

Book a demo

Find out how you can leverage UltraFacility Portal to achieve your business objectives today.

Request a demo